Improving dielectric properties of epitaxial Gd2O3 thin films on silicon by nitrogen doping
Roy Chaudhuri, Ayan, Fissel, A., Archakam, V. R., Osten, H. J.Volume:
102
Year:
2013
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4775688
File:
PDF, 970 KB
english, 2013