The effect of light soaking on crystalline silicon surface...

Journal of Applied Physics 2013 Vol. 113; Iss. 2

The effect of light soaking on crystalline silicon surface passivation by atomic layer deposited Al2O3

Liao, Baochen, Stangl, Rolf, Mueller, Thomas, Lin, Fen, Bhatia, Charanjit S., Hoex, Bram
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Volume:
113
Year:
2013
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4775595
File:
PDF, 679 KB
english, 2013
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