Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1993 / 7 Vol. 11; Iss. 4
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Novel Si-based superlattices consisting of alternating layers of crystalline Si and porous amorphous Si1−xGex alloys
Fathauer, R. W.Volume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.586962
Date:
July, 1993
File:
PDF, 640 KB
english, 1993