Metal-organic chemical vapor deposition of quasi-normally-off AlGaN/GaN field-effect transistors on silicon substrates using low-temperature grown AlN cap layers
Tan, S., Selvaraj, S. L., Egawa, T.Volume:
97
Year:
2010
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.3475394
File:
PDF, 602 KB
english, 2010