3D Simulations on Surface Growth Via Chemical Vapour...

3D Simulations on Surface Growth Via Chemical Vapour Deposition: Kinetic Monte Carlo Investigation

Thongon, Arjaree, Choopun, Supab, Yimnirun, Rattikorn, Laosiritaworn, Yongyut
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Volume:
155
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584587.2014.905352
Date:
July, 2014
File:
PDF, 300 KB
english, 2014
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