[IEEE 2008 Second International Conference on Sensor Technologies and Applications (sensorcomm 2008) - Cap Esterel, France (2008.08.25-2008.08.31)] 2008 Second International Conference on Sensor Technologies and Applications (sensorcomm 2008) - Deformation Reduction of a MEMS Sensor by Stress Balancing of Multilayer
Yang, Woo Seok, Cho, Seong M., Ryu, Hojun, Cheon, Sang Hoon, Yu, Byoung Gon, Choi, Chang AuckYear:
2008
Language:
english
DOI:
10.1109/sensorcomm.2008.81
File:
PDF, 627 KB
english, 2008