High performance of compact radical monitoring probe in...

High performance of compact radical monitoring probe in H[sub 2]/N[sub 2] mixture plasma

Moon, Chang Sung, Takeda, Keigo, Takashima, Seigo, Sekine, Makoto, Setsuhara, Yuichi, Shiratani, Masaharu, Hori, Masaru
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Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3327926
File:
PDF, 449 KB
english, 2010
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