Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2010 Vol. 28; Iss. 2
High performance of compact radical monitoring probe in H[sub 2]/N[sub 2] mixture plasma
Moon, Chang Sung, Takeda, Keigo, Takashima, Seigo, Sekine, Makoto, Setsuhara, Yuichi, Shiratani, Masaharu, Hori, MasaruVolume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3327926
File:
PDF, 449 KB
english, 2010