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[IEEE 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 - Boston, MA, USA (30 April-2 May 2002)] 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) - A manufacturable shallow trench isolation process for sub-0.2 um DRAM technologies
Lien, W.Y., Yeh, W.G., Li, C.H., Tu, K.C., Chang, I.H., Chu, H.C., Liaw, W.R., Lee, H.F., Chou, H.M., Chen, C.Y., Chi, M.H.Year:
2002
Language:
english
DOI:
10.1109/asmc.2002.1001565
File:
PDF, 534 KB
english, 2002