Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2010 Vol. 28; Iss. 6
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Development of a simple, compact, low-cost interference lithography system
Korre, Hasan, Fucetola, Corey P., Johnson, Jeremy A., Berggren, Karl K.Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3504498
File:
PDF, 617 KB
english, 2010