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Nanoscale fatigue and fracture toughness measurements of multilayered thin film structures for digital micromirror devices
Wei, Guohua, Bhushan, Bharat, Jacobs, S. JoshuaVolume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1738659
File:
PDF, 1.07 MB
english, 2004