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Fabrication of monolithic multilevel high-aspect-ratio ferromagnetic devices
Tao Wang,, McCandless, A.B., Lienau, R.M., Kelly, K.W., Hensley, D., Desta, Y., Zhong-Geng Ling,Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2004.839339
Date:
April, 2005
File:
PDF, 2.12 MB
english, 2005