Summary Abstract: IrO2 radio frequency sputtered thin film...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1986 / 5 Vol. 4; Iss. 3

Summary Abstract: IrO2 radio frequency sputtered thin film properties

Kreider, Kenneth
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Volume:
4
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.573858
Date:
May, 1986
File:
PDF, 377 KB
english, 1986
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