Thin film deposition with physical vapor deposition and...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2003 Vol. 21; Iss. 5

Thin film deposition with physical vapor deposition and related technologies

Rossnagel, S. M.
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Volume:
21
Year:
2003
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1600450
File:
PDF, 1.35 MB
english, 2003
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