Probe measurements of plasma potential nonuniformity due to...

Journal of Applied Physics 2005 Vol. 97; Iss. 12

Probe measurements of plasma potential nonuniformity due to edge asymmetry in large-area radio-frequency reactors: The telegraph effect

Howling, A. A., Derendinger, L., Sansonnens, L., Schmidt, H., Hollenstein, Ch., Sakanaka, E., Schmitt, J. P. M.
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Volume:
97
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1940136
File:
PDF, 671 KB
english, 2005
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