An inorganic anti-reflective coating for use in...

An inorganic anti-reflective coating for use in photolithography

Tompkins, Harland G., Sellers, James A., Tracy, Clarence
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Volume:
73
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.352855
File:
PDF, 1.12 MB
english, 1993
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