Uniformity study in large-area showerhead reactors
Sobbia, R., Sansonnens, L., Bondkowski, J.Volume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1868613
File:
PDF, 562 KB
english, 2005