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Fabrication of nanoscale gaps in integrated circuits
Krahne, Roman, Yacoby, Amir, Shtrikman, Hadas, Bar-Joseph, Israel, Dadosh, Tali, Sperling, JosephVolume:
81
Year:
2002
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1495080
File:
PDF, 404 KB
english, 2002