[IEEE 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 - Maui, HI, USA (28-30 Oct. 2001)] Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 (Cat. No.01EX516) - A study of oxide patterning on titanium thin films using scanning probe microscopy
Huey-Ru Tsai,, Tsung-Eong Hsieh,, Shih-Che Lo,, Hsi-Hsiang Lin,Year:
2001
Language:
english
DOI:
10.1109/nano.2001.966422
File:
PDF, 497 KB
english, 2001