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Radiation damage of gallium arsenide induced by reactive ion etching
Hara, Tohru, Suzuki, Hidenori, Suga, Akio, Terada, Toshiyuki, Toyoda, NobuyukiVolume:
62
Year:
1987
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.339125
File:
PDF, 570 KB
english, 1987