Thermal simulation of laser lift-off AlGaN/GaN high...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2011 Vol. 29; Iss. 4

Thermal simulation of laser lift-off AlGaN/GaN high electron mobility transistors mounted on AlN substrates

Kang, T. S., Lo, C. F., Liu, L., Finch, R., Ren, F., Wang, X. T., Douglas, E., Pearton, S. J., Hung, S. T., Chang, C.-J.
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3605298
File:
PDF, 704 KB
english, 2011
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