[IEEE 2013 Transducers & Eurosensors XXVII: The 17th...

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[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Micromachined biocompatible catheter flow sensor with trench structure

Matsuyama, Takuya, Yamazaki, Yudai, Shikida, Mitsuhiro, Matsushima, Miyoko, Kawabe, Tsutomu
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Year:
2013
Language:
english
DOI:
10.1109/transducers.2013.6626782
File:
PDF, 604 KB
english, 2013
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