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[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Automated Extraction of Multi-Energy Domain Reduced-Order Models Demonstrated on Capacitive MEMS Microphones
Bedyk, W., Niessner, M., Schrag, G., Wachutka, G., Margesin, B., Faes, A.Year:
2007
Language:
english
DOI:
10.1109/sensor.2007.4300367
File:
PDF, 1.82 MB
english, 2007