Characterization and comparison of silicon nitride films...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2012 Vol. 30; Iss. 2

Characterization and comparison of silicon nitride films deposited using two novel processes

Sharma, Vivek, Bailey, Adam, Dauksher, Bill, Tracy, Clarence, Bowden, Stuart, O’Brien, Barry
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Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3687423
File:
PDF, 1.12 MB
english, 2012
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