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Influence of clearance on the pumping performance of a molecular drag pump*
Liqun, Shi, Yue, Zhu, Xiaozhen, Wang, Shijing, PangVolume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.578795
Date:
May, 1993
File:
PDF, 720 KB
english, 1993