Elastic Modulus Study of Gold Thin Film for Use as an Actuated Membrane in a Superconducting RF MEM Switch
Bogozi, A., Datye, A.V., Brzhezinskaya, M., Hijazi, Y.Z., Martinez, J., Noel, J., Wu, K.H., Vlasov, Y.A., Larkins, G.L.Volume:
15
Language:
english
Journal:
IEEE Transactions on Appiled Superconductivity
DOI:
10.1109/tasc.2005.850157
Date:
June, 2005
File:
PDF, 214 KB
english, 2005