Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2006 Vol. 24; Iss. 3
Reactive ion etch damage on GaN and its recovery
Fan, Qian, Chevtchenko, S., Ni, Xianfeng, Cho, Sang-Jun, Yun, Feng, Morkoç, HadisVolume:
24
Year:
2006
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.2192542
File:
PDF, 502 KB
english, 2006