[IEEE 2013 IEEE 40th International Conference on Plasma Sciences (ICOPS) - San Francisco, CA, USA (2013.06.16-2013.06.21)] 2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) - Properties of nonthermal capacitively coupled plasmas generated in narrow quartz tubes for synthesis of silicon na-noparticles
Song, Sang-Heon, Le Picard, Romain, Girshick, Steven L., Kortshagen, Uwe R., Kushner, Mark J.Year:
2013
Language:
english
DOI:
10.1109/plasma.2013.6634910
File:
PDF, 101 KB
english, 2013