The effect of Si and Cu on the interactions between Al...

Journal of Applied Physics 1992 Vol. 72; Iss. 7

The effect of Si and Cu on the interactions between Al films and a TiW barrier layer

Chang, Peng-Heng, Chen, Huei-Ming, Liu, Hung-Yu
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Volume:
72
Year:
1992
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.351524
File:
PDF, 750 KB
english, 1992
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