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[IEEE 21st IEEE Convention of the Electrical and Electronic Engineers in Israel. Proceedings - Tel-Aviv, Israel (11-12 April 2000)] 21st IEEE Convention of the Electrical and Electronic Engineers in Israel. Proceedings (Cat. No.00EX377) - Novel dual-axis SOI micromachined inertial sensors with optical sensing: design and fabrication
Bochobza-Degani, O., Seter, D.J., Socher, E., Nemirovsky, Y.Year:
2000
Language:
english
DOI:
10.1109/eeei.2000.924321
File:
PDF, 257 KB
english, 2000