High resolution medium energy ion scattering analysis for...

High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultrathin high-k layers

Reading, M. A., van den Berg, J. A., Zalm, P. C., Armour, D. G., Bailey, P., Noakes, T. C. Q., Parisini, A., Conard, T., De Gendt, S.

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Volume:

Year:

2010

Language:

english

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

DOI:

10.1116/1.3248264

File:

PDF, 966 KB

english, 2010

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