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[IEEE 30th Annual Proceedings Reliability Physics 1992 - San Diego, CA, USA (1992.03.31-1992.04.2)] 30th Annual Proceedings Reliability Physics 1992 - Development of design rules for reliable tungsten plugs using simulations
IslamRaja, M.M., Bariya, A.J., Saraswat, K.C., Cappelli, M.A., McVittie, J.P., Moberly, L., Lahri, R.Year:
1992
DOI:
10.1109/relphy.1992.187614
File:
PDF, 339 KB
1992