Nondestructive one-dimensional scanning capacitance microscope dopant profile determination method and its application to three-dimensional dopant profiles
Kang, Eu-Seok, Kang, Jeong-Won, Hwang, Ho-Jung, Lee, Jun-HaVolume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.582473
File:
PDF, 567 KB
english, 2000