Electric current oscillations in a parallel‐plate plasma reactor
Seeböck, R. J., Deutsch, R., Räuchle, E.Volume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.578791
Date:
May, 1993
File:
PDF, 832 KB
english, 1993