![](/img/cover-not-exists.png)
Transition from E to H mode discharge in pulse-modulated inductively coupled plasmas
Edamura, Manabu, Benck, Eric C.Volume:
21
Year:
2003
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1545756
File:
PDF, 423 KB
english, 2003