Photoluminescence study of defects in Si[sup +] ion...

Journal of Applied Physics 1998 Vol. 83; Iss. 7

Photoluminescence study of defects in Si[sup +] ion implanted thermal SiO[sub 2] films

Zhang, Jia-Yu, Bao, Xi-Mao, Li, Neng-Sheng, Song, Hai-Zhi
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Volume:
83
Year:
1998
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.366578
File:
PDF, 371 KB
english, 1998
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