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Effect of gas flow on the growth of In-rich AlInN films by metal-organic chemical vapor deposition
Kang, Ting-Ting, Yamamoto, Masatomo, Tanaka, Mikiyasu, Hashimoto, Akihiro, Yamamoto, AkioVolume:
106
Year:
2009
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3212969
File:
PDF, 791 KB
english, 2009