Generation of excess Si species at Si∕SiO[sub 2] interface...

Generation of excess Si species at Si∕SiO[sub 2] interface and their diffusion into SiO[sub 2] during Si thermal oxidation

Ibano, Kenzo, Itoh, Kohei M., Uematsu, Masashi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
103
Year:
2008
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2831293
File:
PDF, 336 KB
english, 2008
Conversion to is in progress
Conversion to is failed