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Generation of excess Si species at Si∕SiO[sub 2] interface and their diffusion into SiO[sub 2] during Si thermal oxidation
Ibano, Kenzo, Itoh, Kohei M., Uematsu, MasashiVolume:
103
Year:
2008
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2831293
File:
PDF, 336 KB
english, 2008