Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2010 Vol. 28; Iss. 6
Facile wide-scale defect detection of UV-nanoimprinted resist patterns by fluorescent microscopy
Kobayashi, Kei, Kubo, Shoichi, Matsui, Shinji, Nakagawa, MasaruVolume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3507440
File:
PDF, 4.95 MB
english, 2010