Facile wide-scale defect detection of UV-nanoimprinted...

Facile wide-scale defect detection of UV-nanoimprinted resist patterns by fluorescent microscopy

Kobayashi, Kei, Kubo, Shoichi, Matsui, Shinji, Nakagawa, Masaru
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Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3507440
File:
PDF, 4.95 MB
english, 2010
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