Modes and the alpha-gamma transition in rf capacitive...

Physics of Plasmas 2006 Vol. 13; Iss. 10

Modes and the alpha-gamma transition in rf capacitive discharges in N[sub 2]O at different rf frequencies

Lisovskiy, V., Booth, J.-P., Landry, K., Douai, D., Cassagne, V., Yegorenkov, V.
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Volume:
13
Year:
2006
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.2364135
File:
PDF, 481 KB
english, 2006
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