Deposition of copper by using self-sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1999 Vol. 17; Iss. 5

Deposition of copper by using self-sputtering

Fu, Jianming, Ding, Peijun, Dorleans, Fernand, Xu, Zheng, Chen, Fusen
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581950
File:
PDF, 759 KB
english, 1999
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