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[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Low-cost maskless grayscale lithography using a new photo-definable polyimide for polymer MEMS applications
Lake, Joseph H., Walsh, Kevin M., McNamara, ShamusYear:
2009
Language:
english
DOI:
10.1109/sensor.2009.5285686
File:
PDF, 865 KB
english, 2009