[IEEE 2012 IEEE 11th International Conference on...

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[IEEE 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Xian, China (2012.10.29-2012.11.1)] 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology - Structural and electrical characteristics of Al-doped TiO2 high-k gate dielectric grown by atomic layer deposition

Xie, Zhang-Yi, Geng, Yang, Ye, Zhi-Yuan, Sun, Qing-Qing, Wang, Peng-Fei, Lu, Hong-Liang, Zhang, David-Wei
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Year:
2012
Language:
english
DOI:
10.1109/icsict.2012.6467639
File:
PDF, 549 KB
english, 2012
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