Thermal stability of plasma deposited thin films of hydrogenated carbon–nitrogen alloys
Anguita, J. V., Silva, S. R. P., Burden, A. P., Sealy, B. J., Haq, S., Hebbron, M., Sturland, I., Pritchard, A.Volume:
86
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.371685
File:
PDF, 331 KB
english, 1999