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Simulated plasma immersion ion implantation processing of thin wires
Lejars, A., Manova, D., Mändl, S., Duday, D., Wirtz, T.Volume:
108
Year:
2010
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3485812
File:
PDF, 372 KB
english, 2010