Hollow oval magnetron for large-area low-energy ions

Journal of Applied Physics 1986 Vol. 60; Iss. 6

Hollow oval magnetron for large-area low-energy ions

I, Lin, Wu, Ming-Shing
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Volume:
60
Year:
1986
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.337195
File:
PDF, 474 KB
english, 1986
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