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Enhancement effect of germanium on oxygen precipitation in Czochralski silicon
Chen, Jiahe, Yang, Deren, Li, Hong, Ma, Xiangyang, Que, DuanlinVolume:
99
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2188130
File:
PDF, 549 KB
english, 2006