A back-side passivation film on a-Si:H thin film transistor
Uchikoga, Shuichi, Kakinoki, Masami, Nakajima, Mitsuo, Suzuki, KoujiVolume:
76
Year:
1994
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.357606
File:
PDF, 817 KB
english, 1994