Oven-Based Thermally Tunable Aluminum Nitride...

Oven-Based Thermally Tunable Aluminum Nitride Microresonators

Kim, Bongsang, Nguyen, Janet, Wojciechowski, Kenneth E., Olsson, Roy H.
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Volume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2012.2235821
Date:
April, 2013
File:
PDF, 1.44 MB
english, 2013
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