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Particle model analyses of N[sub 2]O dilution with He on electrical characteristics of radio-frequency discharges
Younis, G., Yousfi, M., Despax, B.Volume:
105
Year:
2009
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3125442
File:
PDF, 674 KB
english, 2009