![](/img/cover-not-exists.png)
[IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Cannes, France (5-7 May 2003)] Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Microfabrication of electroplated integrated chromium tips onto a silicon actuator
Leawon, E., Ayela, F.Year:
2003
Language:
english
DOI:
10.1109/dtip.2003.1287067
File:
PDF, 209 KB
english, 2003